Location History:
- Chicago, IL (US) (1980)
- Sebastopol, CA (US) (1986 - 1990)
Company Filing History:
5 out of 95 
1 out of 13 
1 out of 832,891 Years Active: 1980-1990
Title: Innovations of David J Drage
Introduction
David J Drage is a notable inventor based in Sebastopol, California. He holds a total of seven patents, showcasing his contributions to the field of technology and engineering. His work primarily focuses on advancements in plasma etching processes, which are crucial in semiconductor manufacturing.
Latest Patents
One of his latest patents is the "Temperature Controlled Chuck for Elevated Temperature Etch Processing." This invention features a parallel plate plasma type etching apparatus equipped with a temperature control chuck. The chuck allows for controlled elevated substrate temperatures, which increases the reaction rate and significantly reduces the likelihood of damage to semiconductor devices. The design includes a large number of equally spaced electrical heaters, with temperature control managed by a sensor.
Another significant patent is the "Plasma Reactor with Removable Insert." This invention describes a parallel plate plasma reactor where the lower electrode consists of a metal electrode with a central pedestal. An insert surrounds the pedestal, holding wafers in contact with it or positioning them above it. The insert can be made from materials such as ceramic or metal, enhancing the reactor's versatility.
Career Highlights
David has worked with Tegal Corporation, where he contributed to the development of innovative technologies in the semiconductor industry. His experience in this field has allowed him to make significant advancements in plasma etching processes.
Collaborations
Throughout his career, David has collaborated with notable individuals such as Mark M Stark and Douglas H Warenback. These collaborations have likely enriched his work and contributed to his success as an inventor.
Conclusion
David J Drage's contributions to the field of semiconductor technology through his patents and collaborations highlight his innovative spirit and dedication to advancing engineering solutions. His work continues to impact the industry positively.