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Forward Citations = 254

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9 inventors (with patents filed for the assignee):

Gerald M Cox (7 out of 11 patents)

Albert Wang (6 out of 6 patents)

Scott J Baron (3 out of 46 patents)

4. Gary B Powell (3 out of 13 patents)

5. Mohammad Kamarehi (3 out of 4 patents)

6. Prasad P Padmanabhan (3 out of 9 patents)

7. Robert Chen (1 out of 1 patent)

8. David J Drage (1 out of 7 patents)

9. Tony Sie (1 out of 2 patents)

13 patents: Sort by Forward Citations

1. 6736927 - Apparatus for increased workpiece throughput (2004-05-18),

2. 6660975 - Method for producing flat wafer chucks (2003-12-09),

3. 6605226 - Method for increased workpiece throughput (2003-08-12),

4. 6499777 - End-effector with integrated cooling mechanism (2002-12-31),

5. 6461801 - Rapid heating and cooling of workpiece chucks (2002-10-08),

6. 6412438 - Downstream sapphire elbow joint for remote plasma generator (2002-07-02),

7. 6409932 - Method and apparatus for increased workpiece throughput (2002-06-25),

8. 6352050 - Remote plasma mixer (2002-03-05),

9. 6263830 - Microwave choke for remote plasma generator (2001-07-24),

10. 6228773 - Synchronous multiplexed near zero overhead architecture for vacuum processes (2001-05-08),

11. 5209803 - Parallel plate reactor and method of use (1993-05-11),

12. 5015331 - Method of plasma etching with parallel plate reactor having a grid (1991-05-14),

13. 4971653 - Temperature controlled chuck for elevated temperature etch processing (1990-11-20),

Matrix Integrated Systems, Inc. is a leading provider of integrated security solutions for businesses of all sizes. With a focus on cutting-edge technology and exceptional customer service, Matrix delivers customized security systems that meet the unique needs of each client. From access control and video surveillance to intrusion detection and monitoring services, Matrix is committed to protecting assets and ensuring peace of mind.

This text is generated by artificial intelligence and may not be accurate.

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USPTO Data Jan 1 1976 - Dec 9 2025

13 Patents

#27 in Richmond, CA

#5,472 in California

#23,099 in US

#43,615 in the World

Richmond, CA, United States of America

Matrix Integrated Systems, Inc.