Company Filing History:
Years Active: 2003
Title: The Innovations of Robert Chen
Introduction
Robert Chen is an accomplished inventor based in El Sobrante, California. He has made significant contributions to the field of semiconductor processing through his innovative designs and methods. His work focuses on enhancing the efficiency and effectiveness of wafer chucks used in semiconductor manufacturing.
Latest Patents
Robert Chen holds a patent for a "Method for producing flat wafer chucks." This invention provides methods and structures for creating extremely flat wafer chucks, which allow for close thermal contact uniformly across a semiconductor processing substrate. The design features an upper and lower section that fit tightly together with flat inner surfaces in face-to-face contact. These sections define at least one groove between them, and although they have asymmetrical thickness, the groove is correspondingly asymmetrical, ensuring it is centered in the assembled chuck. A heater element, such as a resistive heater, is placed within the groove prior to assembly. After assembly and tightening, the chuck undergoes thermal cycling above the normal operating temperature before secondary machining, ensuring that flatness is maintained during high-temperature operation. Robert Chen has 1 patent to his name.
Career Highlights
Robert Chen is currently employed at Matrix Integrated Systems, Inc., where he continues to innovate and develop new technologies in the semiconductor industry. His work has been instrumental in advancing the capabilities of wafer chucks, which are critical components in semiconductor manufacturing processes.
Collaborations
Robert collaborates with talented individuals in his field, including his coworker Albert Wang. Together, they work on projects that push the boundaries of semiconductor technology and improve manufacturing processes.
Conclusion
Robert Chen's contributions to the field of semiconductor processing through his innovative patent demonstrate his commitment to advancing technology. His work at Matrix Integrated Systems, Inc. continues to impact the industry positively.