Damien Martin Slevin

Title: **Innovative Contributions of Damien Martin Slevin**

Introduction

Damien Martin Slevin, an accomplished inventor based in Salem, Oregon, has made significant contributions to the field of substrate processing technology, holding a remarkable total of 16 patents. His innovations reflect a deep understanding of complex mechanical systems, particularly in the areas of multi-station process modules and plasma processing systems.

Latest Patents

Among his latest patents is the "Mechanical indexer for multi-station process module." This technology showcases a sophisticated design that includes multiple processing stations, each equipped to perform unique processes on substrates. The mechanical indexer within this module features several end effectors that can rotate around a central axis, allowing for efficient handling and processing of substrates. Notably, it is capable of positioning more than one end effector at the same processing station simultaneously, enhancing operational efficiency.

Another significant patent is the "High temperature RF connection with integral thermal choke." This invention pertains to a thermal choke rod that connects a radio frequency source to a substrate support in plasma processing systems. It includes a tubular member designed with connectors that improve the performance of the RF connection, with particular attention to thermal management, a critical aspect in maintaining system reliability.

Career Highlights

Damien Slevin's professional journey includes key roles at well-known companies such as Lam Research Corporation and Novellus Systems Incorporated. His work at these firms has not only advanced his career but has also contributed to the growth of the semiconductor processing industry.

Collaborations

In his career, Damien has had the opportunity to collaborate with notable coworkers, including Karl Frederick Leeser and Timothy Scott Thomas. These professional relationships have fostered an environment of innovation and knowledge sharing, critical to the development of efficient processing systems.

Conclusion

With 16 patents to his name, Damien Martin Slevin stands out as a visionary inventor in substrate processing technology. His latest innovations demonstrate a commitment to advancing the field while addressing the complexities involved in modern manufacturing processes. As he continues to push the boundaries of technology, his contributions will undoubtedly inspire future advancements in the industry.