The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Oct. 20, 2026
Filed:
Apr. 21, 2022
Applicant:
Lam Research Corporation, Fremont, CA (US);
Inventors:
Adriana Vintila, Wilsonville, OR (US);
Shriram Vasant Bapat, Beaverton, OR (US);
Emily Ann Alden, Portland, OR (US);
Damien Martin Slevin, Salem, OR (US);
Assignee:
Lam Research Corporation, Fremont, CA (US);
Primary Examiner:
Int. Cl.
CPC ...
H10P 72/00 (2026.01); C23C 16/455 (2006.01);
U.S. Cl.
CPC ...
H10P 72/0604 (2026.01); C23C 16/45565 (2013.01); C23C 16/45597 (2013.01); H10P 72/0421 (2026.01);
Abstract
Some embodiments provide apparatuses capable of enabling the measurement of various characteristics of a showerhead-substrate gap in a processing chamber, including at high temperatures and at low-light conditions, using an imaging system external to the processing chamber.
Quick Actions:
Vintila, Adriana. (2026). Apparatuses for measuring gap between a substrate support plane and gas distribution device (U.S. Patent No. 12772781). U.S. Patent and Trademark Office. https://idiyas.com/patent/badge/12772781
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