Eden Prairie, MN, United States of America

Christopher J Voges

USPTO Granted Patents = 4 

Average Co-Inventor Count = 3.7

ph-index = 1

Forward Citations = 8(Granted Patents)


Company Filing History:


Years Active: 2013-2023

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4 patents (USPTO):Explore Patents

Title: Christopher J Voges: Innovator in Wafer Inspection Technology

Introduction

Christopher J Voges is a notable inventor based in Eden Prairie, MN (US). He has made significant contributions to the field of semiconductor inspection technology, holding a total of 4 patents. His innovative work has advanced the capabilities of wafer inspection systems, making them more efficient and precise.

Latest Patents

One of Voges' latest patents is a wafer inspection system that includes a laser triangulation sensor. This system features a laser that projects a line onto a wafer for inspection. It also incorporates a magnification changer with multiple selectable lenses of varying magnification. The first camera captures the line projected onto the wafer and outputs three-dimensional line data that indicates the height of the wafer's features. Each lens in the magnification changer maintains the same nominal focal plane position of the first camera relative to the wafer.

Another significant patent is for an on-axis focus sensor and method. This focus height sensor is designed for optical systems used in the inspection of semiconductor devices. It includes a sensor beam source that emits a beam of electromagnetic radiation. A reflector receives this beam and directs it toward the surface of a semiconductor device within the optical system's field of view. The reflector is strategically positioned to capture a portion of the beam reflected back from the semiconductor surface, directing it to a sensor that outputs a signal correlating to the surface's position along the optical axis.

Career Highlights

Christopher J Voges has worked with prominent companies in the semiconductor industry, including Rudolph Technologies, Inc. and Onto Innovation Inc. His experience in these organizations has allowed him to develop and refine his innovative technologies, contributing to advancements in wafer inspection.

Collaborations

Throughout his career, Voges has collaborated with talented professionals, including Ajay Pai and Antony Ravi Philip. These collaborations have fostered an environment of innovation and have led to the development of cutting-edge technologies in the field.

Conclusion

Christopher J Voges is a distinguished inventor whose work in wafer inspection technology has made a lasting impact on the semiconductor industry. His patents reflect his commitment to innovation and excellence in engineering.

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