Location History:
- Kensington, CA (US) (2003)
- Oakland, CA (US) (2005 - 2010)
Company Filing History:
Years Active: 2003-2010
Title: Innovations by Chris Lee
Introduction
Chris Lee is an accomplished inventor based in Oakland, CA. He has made significant contributions to the field of semiconductor technology, holding a total of 6 patents. His work focuses on improving processes in plasma etching, which is crucial for the fabrication of integrated circuits.
Latest Patents
One of Chris Lee's latest patents is titled "Method to improve profile control and N/P loading in dual doped gate applications." This patent describes a method for etching a polysilicon gate structure in a plasma etch chamber. The process begins with defining a pattern that protects a polysilicon film to be etched. A plasma is then generated, and substantially all of the unprotected polysilicon film is etched away. Following this, a silicon-containing gas is introduced to etch the remaining polysilicon film while maintaining the gas flow. Additionally, an etch chamber designed to introduce a silicon-containing gas during the etching process is also detailed in this patent.
Another significant patent by Chris Lee is the "Method for multi-layer resist plasma etch." This invention outlines a method for etching a multi-layer resist defined over a substrate in a plasma etch chamber. The process starts with introducing the substrate, which has a pattern defined on the first layer of the multi-layer resist, into the etch chamber. SOgas flows into the chamber, and a plasma is struck while the SOgas is flowing. The multi-layer resist is then effectively etched.
Career Highlights
Chris Lee is currently employed at Lam Research Corporation, a leading company in the semiconductor equipment industry. His work at Lam Research has allowed him to develop innovative solutions that enhance the efficiency and effectiveness of semiconductor manufacturing processes.
Collaborations
Throughout his career, Chris has collaborated with talented individuals such as Vahid Vahedi and Frank Lin. These collaborations have contributed to the advancement of technology in the semiconductor field.
Conclusion
Chris Lee's contributions to the field of semiconductor technology through his patents and work at Lam Research Corporation highlight his innovative spirit and dedication to advancing the industry. His inventions continue to play a vital role in improving semiconductor manufacturing processes.