Company Filing History:
Years Active: 2014-2025
Title: Innovative Contributions of Inventor Ching-Hai Yang in Semiconductor Manufacturing
Introduction
Ching-Hai Yang is a distinguished inventor based in Taipei, Taiwan, with a notable portfolio of 11 patents primarily focused on advancements in semiconductor manufacturing. His innovative work has significantly impacted the electronics industry, contributing to the efficiency and effectiveness of semiconductor device production.
Latest Patents
Among his latest patents, Ching-Hai Yang has developed a comprehensive method and system for manufacturing a semiconductor device. This method encompasses several steps: first, it involves forming a photoresist layer over a wafer to create a photoresist-coated wafer. The photoresist layer is then selectively exposed to actinic radiation, establishing a latent pattern in the photoresist layer. Following this, the latent pattern is developed by applying a developer under a specific pressure gas flow setting within a development chamber. The process continues with rinsing the photoresist layer to create a patterned photoresist layer that reveals part of the wafer. Finally, the patterned layer undergoes spin drying under a second pressure gas flow setting, which is greater than the first, ensuring optimal results.
Ching-Hai Yang is also credited with another significant patent relating to semiconductor manufacturing apparatus and methods. This innovative approach includes forming a material layer over a substrate and illuminating specific regions of this layer with light. By recording the intensity of the reflected light, the method enables the precise determination of the material layer's thickness in the illuminated region.
Career Highlights
Currently, Ching-Hai Yang is associated with Taiwan Semiconductor Manufacturing Company Limited, a leader in the semiconductor manufacturing industry. His creativity and technical expertise have not only led to numerous patents but have also sparked advancements in the manufacturing processes utilized within the company.
Collaborations
Throughout his career, Ching-Hai Yang has had the pleasure of collaborating with esteemed colleagues, including Yao-Hwan Kao and Shang-Sheng Li. These partnerships have fostered an environment of innovation, enhancing the development of groundbreaking technologies in semiconductor production.
Conclusion
Ching-Hai Yang's contributions to semiconductor technology through his inventive patents and collaborative efforts underline his pivotal role in advancing the field. His dedication to innovation continues to shape the future of electronics, paving the way for continued growth and development in semiconductor manufacturing.
Inventor’s Patent Attorneys refers to legal professionals with specialized expertise in representing inventors throughout the patent process. These attorneys assist inventors in navigating the complexities of patent law, including filing patent applications, conducting patent searches, and protecting intellectual property rights. They play a crucial role in helping inventors secure patents for their innovative creations.