This inventor holds 3 USPTO granted patents. Top assignee: Tokyo Electron Limited. Active years: 2002-2009.
Company Filing History:
Years Active: 2002-2009
Title: Chihiro Taguchi: Innovator in Plasma Treatment Technology
Introduction
Chihiro Taguchi is a notable inventor based in Kofu, Japan. She has made significant contributions to the field of plasma treatment technology, holding a total of 3 patents. Her work focuses on enhancing the efficiency and effectiveness of substrate tables and plasma treating devices.
Latest Patents
Chihiro Taguchi's latest patents include innovative methods for creating substrate tables and plasma treating devices. One of her key inventions involves a susceptor of a plasma treating device, or the electrostatic chuck of a substrate table, which is formed using a ceramic thermal spray method. This method includes a thermally sprayed ceramic layer that is pore-sealed by methacrylic resin. The resin raw material, primarily containing methyl methacrylate, is applied and impregnated into the thermally sprayed ceramic layer. This process is then cured to fill the pores between ceramic particles, ensuring perfect pore sealing without producing additional pores during curing.
Career Highlights
Chihiro Taguchi is currently employed at Tokyo Electron Limited, where she continues to develop cutting-edge technologies in her field. Her innovative approaches have positioned her as a key player in the advancement of plasma treatment solutions.
Collaborations
Chihiro has collaborated with esteemed colleagues such as Shinji Muto and Nobuyuki Okayama, contributing to a dynamic work environment that fosters innovation and creativity.
Conclusion
Chihiro Taguchi's contributions to plasma treatment technology exemplify her dedication to innovation and excellence. Her patents reflect a commitment to improving industrial processes, making her a significant figure in her field.