Location History:
- Kaohusiung, TW (2004)
- Kaohsiung, TW (2004 - 2008)
Company Filing History:
Years Active: 2004-2008
Title: Innovations by Chih-Pen Yen
Introduction
Chih-Pen Yen is a notable inventor based in Kaohsiung, Taiwan. He has made significant contributions to the field of semiconductor processing through his innovative patents. With a total of 3 patents, his work focuses on enhancing safety and efficiency in gas flow control systems.
Latest Patents
One of his latest patents is a gas flow control system with interlock. This system is designed to control the flow of gases into a reaction chamber used in processing semiconductor devices. It includes a safety interlock feature that prevents the inadvertent mixing of incompatible, reactive gases. The interlock feature is implemented in an interlock control circuit that operates a valve system for individually controlling the flow of separate gases into the chamber. The interlock circuit consists of a series of relay switches and timers arranged to create a time delay between the initiation of flow from separate sources into the chamber.
Another significant patent is the method and apparatus for early detection of material accretion and peeling in a plasma system. This invention includes multiple optical sensors provided in the chamber above a gas distribution plate or other surfaces inside the chamber. The optical sensors are connected to a central process controller capable of terminating the operation of the chamber and may be equipped with an alarm. If the optical sensors detect asymmetries in brightness or light reflection among various portions of the gas distribution plate, a signal is sent to the process controller, which may terminate the plasma process or alert operating personnel.
Career Highlights
Chih-Pen Yen is currently employed at Taiwan Semiconductor Manufacturing Company Ltd. His work has been instrumental in advancing technologies that ensure the safe and efficient operation of semiconductor manufacturing processes.
Collaborations
He has collaborated with notable coworkers, including Jeng-Chiang Chuang and Yung-Mao Hsu, contributing to various innovative projects in the semiconductor field.
Conclusion
Chih-Pen Yen's contributions to semiconductor technology through his patents demonstrate his commitment to innovation and safety in the industry. His work continues to influence the development of advanced manufacturing processes.