This inventor holds 3 USPTO granted patents. Top assignee: Taiwan Semiconductor Manufacturing Comp. Ltd.. Active years: 2005.
Data source: USPTO (United States Patent and Trademark Office) public patent records. Weekly synchronization. How IDiyas builds this profile
Company Filing History:
Years Active: 2005
Title: Chien-Ling Huang: Semiconductor Manufacturing Inventor.
Introduction
Chien-Ling Huang is an inventor based in Hsinchu, Taiwan, whose patent work addresses equipment and process control in semiconductor manufacturing. His inventions include technologies for delivering chemical mechanical polishing slurry and for sensing wafers during handling. Huang is associated with Taiwan Semiconductor Manufacturing Company Limited and holds 3 patents.
Latest Patents
Huang’s listed patents include two inventions focused on improving reliability and control in semiconductor production.
“Dual Mode Hybrid Control and Method for CMP Slurry” describes a system for controlling polishing slurry delivery to a chemical mechanical polishing (CMP) apparatus. It combines a linear table and a proportional-integral-derivative (PID) controller connected to a slurry pump. A bubble trap and flowmeter downstream of the pump provide additional control inputs, while the CMP apparatus receives slurry downstream of the flowmeter.
“Automatic Sensing Wafer Blade and Method for Using” describes a wafer-handling blade equipped with a sensor to detect whether a wafer is present. The blade has a V-shaped seal ring and may use a limit switch or capacitance sensor. Its sensing features are also designed to identify potential blade failures associated with particles, liquid contamination, or an aged or malfunctioning seal ring.
Career Highlights
Huang’s patent portfolio reflects work on practical challenges in semiconductor fabrication, including precise slurry delivery and dependable wafer handling. These technologies aim to support process control and help detect conditions that could interfere with manufacturing operations.
Collaborations
Huang is associated with Taiwan Semiconductor Manufacturing Company Limited. His listed coworkers include Chin-Hsin Peng and Chung-Hao Tseng.
Conclusion
Chien-Ling Huang’s inventions focus on improving control and reliability in semiconductor manufacturing, particularly in CMP slurry delivery and wafer handling.
Data source: USPTO (United States Patent and Trademark Office) public patent records. Weekly synchronization. How IDiyas builds this profile