Chieh-Jen Cheng

Title: Innovations by Chieh-Jen Cheng

Introduction

Chieh-Jen Cheng is a prominent inventor based in Hsin-Chu, Taiwan. He has made significant contributions to the field of semiconductor technology, holding a total of 12 patents. His work focuses on developing advanced cleaning equipment for wafer chucks used in extreme ultraviolet (EUV) lithography.

Latest Patents

Chieh-Jen Cheng's latest patents include a method and apparatus for removing contamination from EUV wafer chucks or clamps. This innovative cleaning equipment is designed to eliminate particles that accumulate between burls on the surface of the wafer chuck. The equipment features a spinning bi-polar electrode positioned close to the surface, which can attract and adsorb charged particle residues using its generated symmetric electric field when the wafer chuck is not in use.

Career Highlights

Throughout his career, Chieh-Jen Cheng has worked with notable companies such as AU Optronics Corporation and Taiwan Semiconductor Manufacturing Company Ltd. His expertise in semiconductor manufacturing processes has made him a valuable asset in the industry.

Collaborations

Chieh-Jen Cheng has collaborated with several professionals in his field, including Hsin-An Chang and Chia-Hun Cheng. These collaborations have contributed to the advancement of technologies in semiconductor cleaning processes.

Conclusion

Chieh-Jen Cheng's innovative work in developing cleaning equipment for EUV wafer chucks showcases his dedication to improving semiconductor manufacturing. His contributions have had a lasting impact on the industry, and his patents reflect his commitment to innovation.