Shanhua, Taiwan

Chia-Hung Chung


Average Co-Inventor Count = 4.8

ph-index = 3

Forward Citations = 29(Granted Patents)


Location History:

  • Shanhua Jen, TW (2005)
  • Shanhua Township, TW (2013 - 2014)
  • Shanhua Township, Tainan County, TW (2007 - 2021)
  • Tainan County, TW (2021 - 2022)
  • Tainan, TW (2004 - 2024)

Company Filing History:


Years Active: 2004-2024

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11 patents (USPTO):Explore Patents

Title: The Innovations of Chia-Hung Chung

Introduction

Chia-Hung Chung is a prominent inventor based in Shanhua, Taiwan. He has made significant contributions to the field of semiconductor technology, holding a total of 11 patents. His work focuses on innovative manufacturing methods that enhance the efficiency and effectiveness of semiconductor devices.

Latest Patents

Chia-Hung Chung's latest patents include a manufacturing method of semiconductor devices and a semiconductor processing system. One of the methods involves developing an exposed photoresist layer using a developer supplied by a developer supplying unit. The ammonia gas by-product of the developer is discharged through a gas outlet into a treating tool, where it is retained and monitored for concentration. Another patent outlines a method that includes forming a photoresist layer on a substrate in a lithography tool, exposing it to create an exposed photoresist layer, and developing it to form a patterned photoresist layer. This process also includes the removal of the ammonia gas by-product from the lithography tool.

Career Highlights

Chia-Hung Chung is currently employed at Taiwan Semiconductor Manufacturing Company Limited, a leading firm in the semiconductor industry. His expertise and innovative approaches have positioned him as a key player in the development of advanced semiconductor technologies.

Collaborations

Chia-Hung Chung collaborates with talented coworkers, including Su-Yu Yeh and Ko-Bin Kao. Their combined efforts contribute to the advancement of semiconductor manufacturing processes.

Conclusion

Chia-Hung Chung's contributions to semiconductor technology through his patents and work at Taiwan Semiconductor Manufacturing Company Limited highlight his role as an influential inventor in the industry. His innovative methods continue to shape the future of semiconductor manufacturing.

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