Chi Lu

Title: The Innovations of Inventor Chi Lu in Semiconductor Processing

Introduction

Chi Lu, a talented inventor based in Sunnyvale, CA, has made significant contributions to the field of semiconductor technology. With three patents to his name, his work focuses on innovative methods and apparatuses for processing substrates, which are crucial for the development of advanced semiconductor devices.

Latest Patents

Chi Lu's latest patents showcase his expertise and ingenuity. One notable patent describes methods and apparatus for processing a substrate. This invention involves supplying oxygen into an etch chamber to react with a silicon-based hardmask layer, forming a protective SiO-like material. The invention enables enhanced etching of ruthenium layers by utilizing nitrogen to sputter some of this SiO-like material onto exposed sidewalls, improving the overall processing efficiency.

Another important patent focuses on a method of forming interconnect structures for semiconductor devices. This process includes etching a patterned interconnect stack to create conductive lines and subsequently forming a self-aligned via, ensuring precision in semiconductor fabrication.

Career Highlights

Chi Lu is currently employed at Applied Materials, Inc., a leading company in the semiconductor industry, where he continues to push the boundaries of technological advancement. His experience and knowledge in substrate processing significantly influence the evolution of semiconductor manufacturing.

Collaborations

Throughout his career, Chi Lu has collaborated with esteemed colleagues, including Chi-I Lang and Hao Jiang. These partnerships have fostered innovation and knowledge exchange, leading to the development of cutting-edge technologies in the industry.

Conclusion

Chi Lu’s contributions to semiconductor processing are invaluable. His three patents reflect his commitment to innovation and excellence in technology. As he continues his work at Applied Materials, Inc., the industry eagerly anticipates the future advancements he will undoubtedly bring forth.