This inventor holds 3 USPTO granted patents. Top assignee: Taiwan Semiconductor Manufacturing Comp. Ltd.. Active years: 2015-2018.
Company Filing History:
Years Active: 2015-2018
Title: Cheng-Hung Hu: Innovator in Semiconductor Technology
Introduction
Cheng-Hung Hu is a prominent inventor based in Hsinchu, Taiwan. He has made significant contributions to the field of semiconductor technology, holding a total of 3 patents. His work focuses on enhancing the efficiency and effectiveness of wafer processing systems.
Latest Patents
Cheng-Hung Hu's latest patents include innovative systems designed for post-implantation wafer warm-up processes. One of his notable inventions is a high-throughput system and method for post-implantation single wafer warm-up. This system comprises an implantation chamber and a warming chamber, which is strategically positioned outside the implantation chamber. It features a first robotic arm that moves a first wafer from the implantation chamber into the warming chamber, while a second robotic arm transfers a second wafer into the implantation chamber. Another patent details a high throughput system for warming a wafer to a desired temperature after undergoing a low-temperature implantation process. This system includes a wafer warming chamber that uniformly warms a single wafer and utilizes multiple robotic arms to facilitate the transfer of wafers throughout the system. The design ensures high throughput by allowing robotic arms to work simultaneously with multiple wafers, while the warming chamber may operate in a vacuum environment to prevent wafer spotting caused by mist condensation.
Career Highlights
Cheng-Hung Hu is currently employed at Taiwan Semiconductor Manufacturing Company Limited, a leading firm in the semiconductor industry. His role involves developing advanced technologies that improve wafer processing efficiency. His contributions have been instrumental in pushing the boundaries of semiconductor manufacturing.
Collaborations
Cheng-Hung Hu has collaborated with notable colleagues, including Ming-Te Chen and Yi-Hann Chen. These partnerships have fostered innovation and have been crucial in the development of cutting-edge semiconductor technologies.
Conclusion
Cheng-Hung Hu's work exemplifies the spirit of innovation in the semiconductor industry. His patents and contributions continue to influence the field, showcasing his commitment to advancing technology.