Cheng-Chung Chen

Title: Innovations by Cheng-Chung Chen in Microelectronics

Introduction

Cheng-Chung Chen, an accomplished inventor based in Tao-Yuan, Taiwan, has made significant contributions to the field of microelectronics. With two patents to his name, his work focuses on addressing critical challenges in integrated circuit fabrication, especially as technology advances towards smaller dimensions.

Latest Patents

One of Cheng-Chung Chen's notable inventions is the "Profile Improvement Method for Patterning." This innovative method tackles the grain phenomenon issue that affects the rough sidewalls of patterns in integrated circuits. As the dimensions of these devices have shrunk to 0.09 micrometers and below, the effects of grain phenomena become increasingly problematic. His method employs a thermal-compressive material and process to enhance grain profile accuracy, which results in improved physical etching performance and a reduction in deviations across top and lateral views.

Another striking patent of his is the "Sandwich Photoresist Structure in Photolithographic Process." This invention introduces a novel photolithographic procedure that constructs a multi-layer photoresist structure. The process involves creating a first photoresist layer on a substrate, followed by an anti-reflection layer, and finally a second photoresist layer. The method facilitates precise patterning through sequential photo-exposures and developments, further advancing the capabilities of photolithography in microelectronics fabrication.

Career Highlights

Cheng-Chung Chen is currently employed at United Microelectronics Corporation, where he continues to drive forward the boundaries of microelectronic technologies. His expertise in the field is a testament to his innovative spirit and dedication to excellence in engineering.

Collaborations

Throughout his career, Cheng-Chung has collaborated with esteemed colleagues, including Benjamin Szu-Min Lin and George Liu. These partnerships have fostered a dynamic environment for innovation, enabling further advancement in their research and development efforts within the microelectronics sector.

Conclusion

Cheng-Chung Chen's contributions to microelectronics through his patents and collaborative work mark him as a notable inventor in the industry. As technology continues to evolve, his innovations will play a pivotal role in shaping the future of integrated circuit fabrication, further enhancing the efficiency and performance of electronic devices.