Location History:
- Dallas, TX (US) (1991 - 2000)
- Phoenix, AZ (US) (2008 - 2009)
Company Filing History:
14 out of 816 
4 out of 2,871 
Years Active: 1991-2009
Title: Charles R. Spinner, III: Innovator in Semiconductor Technology
Introduction
Charles R. Spinner, III is a notable inventor based in Dallas, TX, with an impressive portfolio of 18 patents. His work has significantly contributed to advancements in semiconductor technology, particularly through the development of methods that improve the performance and reliability of integrated circuits.
Latest Patents
Spinner's latest patents include innovative strategies for reducing metal dishing after chemical mechanical polishing (CMP). One notable invention details a protective barrier layer, formed of materials such as titanium or titanium nitride, designed to minimize chemical removal during the CMP process. By applying this protective layer on a conformal tungsten layer, Spinner's method ensures that upper topological regions are removed first during CMP, while lower topological regions remain protected. This technique results in a substantially planar CMP patterned tungsten that aligns seamlessly with interlevel dielectrics, avoiding dishing even in large-area tungsten structures like MOS capacitor structures.
Career Highlights
Throughout his career, Charles R. Spinner, III has collaborated with significant industry players in semiconductor manufacturing. He has lent his expertise to reputable companies, including Sgs-Thomson Microelectronics Limited and STMicroelectronics GmbH. His dedication to innovation has led him to develop critical methodologies that enhance semiconductor device performance.
Collaborations
In his journey as an inventor, Spinner has worked alongside talented colleagues such as Fu-Tai Liou and Michael E. Haslam. These collaborations have fostered an environment for creative problem-solving and groundbreaking advancements in semiconductor technologies.
Conclusion
Charles R. Spinner, III stands as a productive inventor in the realm of semiconductor technology, with his contributions showing profound impacts on manufacturing processes. His patented innovations reflect the intersection of engineering and creativity, solidifying his reputation in the industry as a leading thinker and innovator.