Company Filing History:
Years Active: 2004-2009
Title: The Innovative Contributions of Charles A. Storey
Introduction
Charles A. Storey is a notable inventor based in Orlando, FL, who has made significant contributions to the field of chemical mechanical polishing (CMP) technology. With a total of 7 patents to his name, Storey has developed innovative methods that enhance the efficiency and effectiveness of CMP devices.
Latest Patents
One of Storey's latest patents is a system for using an offset gage for CMP polishing pad alignment and adjustment. This method and system utilize an offset dial gage to ensure precise alignment and adjustment of polishing pads attached to turntables in CMP devices. In this embodiment, the offset dial gage contacts the side of the turntable, while a sensor tip measures the edge of the polishing pad. This process allows for an assessment of the radial displacement of the polishing pad edge relative to the turntable. Based on these measurements, the polishing pad can be deemed acceptably positioned, trimmed, or replaced. This innovation significantly reduces or eliminates defect patterns associated with side unloading of semiconductor wafers from CMP turntables.
Career Highlights
Storey has built a successful career at Agere Systems Inc., where he has applied his expertise in CMP technology. His work has been instrumental in advancing the capabilities of semiconductor manufacturing processes.
Collaborations
Throughout his career, Storey has collaborated with talented individuals such as Jose Omar Rodriguez and Andres B. Garcia, contributing to a dynamic and innovative work environment.
Conclusion
Charles A. Storey's contributions to CMP technology through his patents and collaborative efforts have made a lasting impact on the industry. His innovative methods continue to enhance the precision and reliability of semiconductor manufacturing processes.
Inventor’s Patent Attorneys refers to legal professionals with specialized expertise in representing inventors throughout the patent process. These attorneys assist inventors in navigating the complexities of patent law, including filing patent applications, conducting patent searches, and protecting intellectual property rights. They play a crucial role in helping inventors secure patents for their innovative creations.