The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Apr. 25, 2006
Filed:
Jul. 21, 2004
Applicants:
Andres B. Garcia, Ocoee, FL (US);
Jose Omar Rodriguez, Orlando, FL (US);
Charles A. Storey, Orlando, FL (US);
Inventors:
Andres B. Garcia, Ocoee, FL (US);
Jose Omar Rodriguez, Orlando, FL (US);
Charles A. Storey, Orlando, FL (US);
Assignee:
Agere Systems, Inc., Allentown, PA (US);
Primary Examiner:
Int. Cl.
CPC ...
B24B 29/00 (2006.01); B24B 5/00 (2006.01);
U.S. Cl.
CPC ...
Abstract
A carrier head for supporting a wafer during a chemical mechanical polishing process is provided. In one exemplary implementation, the carrier head may comprise a wear ring, and a slidably movable pressure plate disposed within the wear ring. The pressure plate may be arranged to provide slidable movement relative to the wear ring. This degree of freedom can accommodate height dimensional changes that may occur in the wear ring.