The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Feb. 06, 2007
Filed:
Aug. 17, 2005
Applicants:
Jose Omar Rodriguez, Orlando, FL (US);
Charles A. Storey, Orlando, FL (US);
Andres B. Garcia, Ocoee, FL (US);
Margareth Seputro, Orlando, FL (US);
Frank Miceli, Orlando, FL (US);
Inventors:
Jose Omar Rodriguez, Orlando, FL (US);
Charles A. Storey, Orlando, FL (US);
Andres B. Garcia, Ocoee, FL (US);
Margareth Seputro, Orlando, FL (US);
Frank Miceli, Orlando, FL (US);
Assignee:
Agere Systems, Inc., Allentown, PA (US);
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
B24B 55/00 (2006.01);
U.S. Cl.
CPC ...
Abstract
Disclosed herein is a process for diminishing contamination of an integrated circuit wafer caused by residual slurry components disposed on a back side of a carrier for engaging an integrated circuit wafer. Also disclosed is a CMP machine configured to wash a back side of a carrier.