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Carsten Schmidt

USPTO Granted Patents = 8 (Patent Applications = 4)

Average Co-Inventor Count = 3.3

ph-index = 1

Forward Citations = 1(Granted Patents)

Company Filing History:

Carl Zeiss Smt Gmbh

Years Active: 2019-2025

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8 patents (USPTO):Sort by Forward CitationsExplore Patents

1. 12307334 - Method and device for evaluating a statistically distributed measured value in the examination of an element of a photolithography process (2025-05-20),

2. 12111579 - Method and apparatus for evaluating an unknown effect of defects of an element of a photolithography process (2024-10-08),

3. 12001145 - Apparatus and method for analyzing an element of a photolithography process with the aid of a transformation model (2024-06-04),

4. 11774859 - Method and apparatus for evaluating an unknown effect of defects of an element of a photolithography process (2023-10-03),

5. 11631168 - Method, computer program and apparatus for determining a quality of a mask of a photolithography apparatus (2023-04-18),

6. 11620429 - Method and device for superimposing at least two images of a photolithographic mask (2023-04-04),

7. 10599936 - Method for correcting the distortion of a first imaging optical unit of a first measurement system (2020-03-24),

8. 10429731 - Method and device for generating a reference image in the characterization of a mask for microlithography (2019-10-01),

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