The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Mar. 24, 2020
Filed:
Jul. 20, 2018
Applicant:
Carl Zeiss Smt Gmbh, Oberkochen, DE;
Inventors:
Assignee:
Carl Zeiss SMT GmbH, Oberkochen, DE;
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
G06K 9/03 (2006.01); G06T 5/00 (2006.01); G06T 7/00 (2017.01); G06K 9/20 (2006.01); G06T 7/70 (2017.01); G06T 7/55 (2017.01);
U.S. Cl.
CPC ...
G06K 9/03 (2013.01); G06K 9/209 (2013.01); G06T 5/006 (2013.01); G06T 7/0004 (2013.01); G06T 7/55 (2017.01); G06T 7/70 (2017.01);
Abstract
A method for correcting the distortion of a first imaging optical unit of a first measurement system is provided, wherein the first imaging optical unit has a first measurement accuracy and the method comprises the steps of: