Carol Goh

Title: **Innovator Spotlight: Carol Goh from Singapore**

Introduction

Carol Goh, a prominent inventor based in Singapore, has made significant contributions to the field of semiconductor device fabrication. With three patents to his name, Goh's innovative methods have advanced the efficiency and effectiveness of semiconductor production processes. His work demonstrates a blend of technical expertise and a commitment to pushing the boundaries of technology.

Latest Patents

Goh's latest patents reflect his focus on addressing common challenges in semiconductor manufacturing. One notable patent is for a **Method for Reducing Sidewall Etch Residue**, which outlines a technique for fabricating semiconductor devices. This method involves forming multiple layers over a substrate and utilizing a patterned masking layer to achieve outwardly tapered sidewalls through isotropic etching of the second layer. This innovative approach facilitates improved device performance by reducing residue that can affect functionality.

Another significant patent is the **Enhanced Passivation Scheme for Post Metal Etch Clean Process**. This two-step passivation procedure is designed to eliminate chlorine from polymer layers that form on metal structures during the etching process. The first step is executed at low substrate temperatures to effectively remove corrosive chlorine from the sides of defined metal structures. The second step raises the temperature, focusing on removing chlorine from polymer layers located at different structural points. This meticulous process ensures a cleaner outcome, leading to enhanced reliability in semiconductor devices.

Career Highlights

Throughout his career, Carol Goh has been associated with renowned semiconductor companies. He gained valuable experience while working at Chartered Semiconductor Manufacturing Ltd and Globalfoundries Singapore Pte. Ltd. His tenure at these organizations has not only honed his skills as an inventor but also positioned him as a crucial player in the semiconductor industry.

Collaborations

Goh has collaborated with esteemed colleagues, including Kin Wai Tang and Xin Wei Zhang, who have contributed to his projects and innovations. These collaborations exemplify the importance of teamwork in research and development, fostering a dynamic environment that leads to groundbreaking advancements in technology.

Conclusion

Carol Goh's contributions to semiconductor manufacturing through his innovative patents underscore his relevance in the technology sector. His work not only enhances the manufacturing processes of semiconductor devices but also serves as an inspiration to fellow inventors and researchers. As he continues to innovate, Carol Goh represents the spirit of technological advancement and the ongoing evolution of the semiconductor industry.