Bruce David Gittleman

Title: The Innovative Contributions of Bruce David Gittleman

Introduction

Bruce David Gittleman is a prominent inventor based in Scottsdale, AZ (US). He has made significant contributions to the field of semiconductor technology, holding a total of 7 patents. His work focuses on advanced deposition processes that enhance the performance and efficiency of semiconductor manufacturing.

Latest Patents

One of Gittleman's latest patents is the Ionized Physical Vapor Deposition (iPVD) process. This innovative system is designed to deposit uniform materials, such as barrier materials, into high aspect ratio nano-size features on semiconductor substrates. The iPVD process enhances sidewall coverage compared to field and bottom coverage while minimizing or eliminating overhang within a vacuum chamber. The system operates at low target power and high pressure (>50 mT) to effectively sputter material from the target. Additionally, RF energy is coupled into the chamber to create a high-density plasma, with a small RF bias applied to improve coverage, particularly at the bottom.

Another notable patent is the Ionized PVD with sequential deposition and etching. This apparatus is programmed to deposit material onto semiconductor substrates by alternating between deposition and etch modes within a vacuum chamber. During the etch modes, static magnetic fields are minimized to less than 150 Gauss, typically below 50 Gauss, and ideally in the range of 0-10 Gauss. The deposition modes may utilize higher magnetic fields, allowing for flexibility in the operational parameters. This innovative approach optimizes the deposition and etching processes, contributing to advancements in semiconductor technology.

Career Highlights

Bruce Gittleman is currently employed at Tokyo Electron Limited, a leading company in the semiconductor manufacturing industry. His expertise and innovative approaches have positioned him as a key figure in the development of advanced semiconductor processes.

Collaborations

Throughout his career, Gittleman has collaborated with notable colleagues, including Glyn J Reynolds and Jozef Brcka. These collaborations have further enhanced his contributions to the field and fostered innovation within the industry.

Conclusion

Bruce David Gittleman's work in semiconductor technology exemplifies the spirit of innovation and dedication to advancing manufacturing processes. His patents and contributions continue to influence the industry, showcasing the importance of research and development in technology.