This inventor holds 34 USPTO granted patents, primarily in Wafer Stage Alignment. Top assignees: Litel Instruments, Lael Instruments, Other. Active years: 1994-2011.
Company Filing History:
32 out of 71Â 
1 out of 1Â 
1 out of 834,411Â Years Active: 1994-2011
Areas of Expertise:
Title: Bruce B. McArthur - Innovator in Photolithography Technology
Introduction
Bruce B. McArthur is an accomplished inventor based in San Diego, California, with an impressive portfolio of 34 patents. His work primarily focuses on advancements in photolithography technology, which plays a crucial role in semiconductor manufacturing.
Latest Patents
Among his latest patents, the "Method and apparatus for self-referenced wafer stage positional error mapping" presents innovative techniques for determining intra-field distortion using a self-referenced rectangular grid reticle pattern. This method involves exposing multiple arrays of alignment attributes onto a substrate, ultimately measuring positional offsets to derive intra-field distortion from these offsets. Another noteworthy patent under his name is also titled "Method and apparatus for self-referenced wafer stage positional error mapping," which establishes a wafer stage overlay error map through standard overlay targets alongside a specialized numerical algorithm. This process includes the repeated exposure of a 2-dimensional array of standard overlay targets onto a photoresist-coated silicon wafer, followed by measuring placement errors to create a comprehensive wafer stage distortion and yaw overlay error map.
Career Highlights
Bruce B. McArthur has made significant contributions to the field of semiconductor technologies through his tenure at various organizations. He has worked with notable companies such as Litel Instruments and Lael Instruments, where he honed his skills in developing cutting-edge technologies for the industry.
Collaborations
Throughout his illustrious career, Bruce has collaborated with other prominent professionals in the field, including Adlai H. Smith and Robert O. Hunter, Jr. These collaborations have undoubtedly enriched his work and have propelled advancements in photolithography and related technologies.
Conclusion
Bruce B. McArthur's innovative contributions to the realm of photolithography underscore his status as a leading inventor. His patents demonstrate a commitment to advancing semiconductor technology and showcase the potential for significant improvements in manufacturing processes. With many patents to his name, McArthur continues to be a pivotal figure in the field, inspiring future innovations.