The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Mar. 04, 2008
Filed:
Aug. 24, 2004
Adlai H. Smith, Escondido, CA (US);
Robert O. Hunter, Jr., San Diego, CA (US);
Bruce B. Mcarthur, San Diego, CA (US);
Thomas K. Khuu, San Diego, CA (US);
Yuji Yamaguchi, San Diego, CA (US);
Adlai H. Smith, Escondido, CA (US);
Robert O. Hunter, Jr., San Diego, CA (US);
Bruce B. McArthur, San Diego, CA (US);
Thomas K. Khuu, San Diego, CA (US);
Yuji Yamaguchi, San Diego, CA (US);
Litel Instruments, San Diego, CA (US);
Abstract
A method and apparatus for front to back substrate registration is described. Alignment characteristics of features on surfaces of substrates can be used to physically align substrates with a multiplicity of integrated alignment optics. Measurement of offsets of the integral alignment optics are used to compute registration data for use in calibration of the substrate global alignment.