Hsinchu, Taiwan

Bo-Wei Chou


Average Co-Inventor Count = 5.7

ph-index = 1

Forward Citations = 1(Granted Patents)


Company Filing History:


Years Active: 2017-2025

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7 patents (USPTO):

Title: Innovator Spotlight: Bo-Wei Chou - A Leader in Wafer Etching Technology

Introduction: Bo-Wei Chou is an accomplished inventor based in Hsinchu, Taiwan, recognized for his significant contributions to the field of semiconductor manufacturing. With a total of five patents to his name, Chou continues to push the boundaries of innovation, particularly in wafer etching technologies.

Latest Patents: Among his latest innovations, Chou has developed two noteworthy patents. The first patent, titled "Method for etching etch layer," introduces a process that involves rotating a wafer and dispensing a liquid from the center to the edge to control its temperature. This process is crucial as it employs an etchant to etch the layer during or after the liquid dispensing. The liquid is precisely dispensed through a nozzle, highlighting Chou's innovative approach to temperature regulation during the etching process.

The second patent, "Method for etching etch layer and wafer etching apparatus," describes both a method and an apparatus for etching an etch layer formed on the front side of a wafer. This apparatus features a first flow channel for carrying a preheated or precooled liquid to control wafer temperature, alongside a temperature-regulating module. Moreover, a second flow channel is responsible for carrying the etchant necessary for etching, further showcasing Chou's commitment to enhancing efficiency in wafer processing.

Career Highlights: Bo-Wei Chou is associated with Taiwan Semiconductor Manufacturing Company Limited, a leading firm in the semiconductor industry. His work at the company reflects the cutting-edge research and development themes prevalent in the field. His inventions not only demonstrate technical expertise but also contribute greatly to advancing manufacturing processes in semiconductor technology.

Collaborations: Throughout his career, Chou has collaborated with fellow innovators, including Manish Kumar Singh and Jui-Ming Shih. These partnerships have enabled him to explore various dimensions of semiconductor etching and refine his inventions.

Conclusion: Bo-Wei Chou stands out as a notable inventor in the semiconductor sphere, driving innovation with his patented technologies. His contributions significantly impact the wafer etching landscape, underscoring the importance of temperature regulation and advanced etching apparatus. With continued collaboration and a focus on research, Chou is poised to remain an influential figure in the field of semiconductor inventions.

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