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Bo-Tsun Liu

USPTO Granted Patents = 55 (Patent Applications = 3)

Average Co-Inventor Count = 5.9

ph-index = 4

Forward Citations = 56(Granted Patents)

Forward Citations (Not Self Cited) = 22(Dec 10, 2025)

Inventors with similar research interests:

Company Filing History:

55 out of 40,780

Taiwan Semiconductor Manufacturing Comp. Ltd.

Years Active: 2017-2025

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Areas of Expertise:

Extreme Ultraviolet Lithography

EUV Radiation Generation

Master Oscillator Power Amplifier

Droplet Generator

EUV Mask Manufacturing

Lithography Exposure Process

Residual Gain Monitoring

EUV Vessel Inspection

Radiation Source Apparatus

EUV Radiation Modification

EUV Lithography System

Debris Reduction Methods

55 patents (USPTO):Sort by Forward CitationsExplore Patents

1. 12347997 - Methods and systems for aligning master oscillator power amplifier systems (2025-07-01),

2. 12302484 - Droplet generator and method of servicing extreme ultraviolet imaging tool (2025-05-13),

3. 12235594 - Method for performing lithography process, light source, and EUV lithography system (2025-02-25),

4. 12193136 - Apparatus and method for generating extreme ultraviolet radiation (2025-01-07),

5. 12181791 - Extreme ultraviolet mask and method of manufacturing the same (2024-12-31),

6. 12072633 - Extreme ultraviolet lithography method, extreme ultraviolet mask and formation method thereof (2024-08-27),

7. 12013641 - Method of reducing undesired light influence in extreme ultraviolet exposure (2024-06-18),

8. 11973302 - Methods and systems for aligning master oscillator power amplifier systems (2024-04-30),

9. 11829082 - Radiation source for lithography process (2023-11-28),

10. 11792909 - Apparatus and method for generating extreme ultraviolet radiation (2023-10-17),

11. 11774844 - Extreme ultraviolet mask and method of manufacturing the same (2023-10-03),

12. 11737200 - Residual gain monitoring and reduction for EUV drive laser (2023-08-22),

13. 11723141 - EUV radiation generation methods and systems (2023-08-08),

14. 11720025 - Extreme ultraviolet lithography method, extreme ultraviolet mask and formation method thereof (2023-08-08),

15. 11703769 - Light source, EUV lithography system, and method for performing circuit layout patterning process (2023-07-18),

Title: Bo-Tsun Liu: Innovator from Taipei

Introduction: Bo-Tsun Liu is a renowned inventor hailing from Taipei, Taiwan, known for his groundbreaking contributions to the field of technology and innovation.

Latest Patents: Bo-Tsun Liu holds several patents in the areas of electronics, telecommunications, and renewable energy, showcasing his diverse range of expertise and innovative thinking.

Career Highlights: With a career spanning over two decades, Bo-Tsun Liu has worked with leading tech companies, research institutions, and universities, where he has spearheaded numerous projects that have pushed the boundaries of technological advancement.

Collaborations: Bo-Tsun Liu has collaborated with top engineers, scientists, and researchers from around the globe, fostering a culture of innovation and knowledge exchange that has led to the development of cutting-edge technologies.

Conclusion: Bo-Tsun Liu's passion for innovation, coupled with his relentless drive to solve complex problems, has solidified his position as a visionary inventor in the world of technology.

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