Bo-Tsun Liu

This inventor holds 56 USPTO granted patents and 3 published patent applications, primarily in Extreme Ultraviolet Lithography (CPC class G03F). Top assignee: Taiwan Semiconductor Manufacturing Comp. Ltd.. Active years: 2017-2026.

USPTO Granted Patents = 56 (Patent Applications = 3)

% Patents Active = 98.2

Average Co-Inventor Count = 5.9

ph-index = 4

Forward Citations = 57(Granted Patents)

Forward Citations (Not Self Cited) = 22(Dec 10, 2025)

Inventors with similar research interests:

Company Filing History:

56 out of 42,759

Taiwan Semiconductor Manufacturing Comp. Ltd.

patents

Years Active: 2017-2026

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Areas of Expertise:

Extreme Ultraviolet

Lithography

Radiation Source

Light Source

EUV Mask

Droplet Generator

EUV Imaging

EUV Drive Laser

Circuit Layout

Debris Reduction

Residual Gain Monitoring

EUV Source Control

56 patents (USPTO):Sort by Forward CitationsExplore Patents

1. 12517434 - Method of reducing undesired light influence in extreme ultraviolet exposure (2026-01-06),

2. 12347997 - Methods and systems for aligning master oscillator power amplifier systems (2025-07-01),

3. 12302484 - Droplet generator and method of servicing extreme ultraviolet imaging tool (2025-05-13),

4. 12235594 - Method for performing lithography process, light source, and EUV lithography system (2025-02-25),

5. 12193136 - Apparatus and method for generating extreme ultraviolet radiation (2025-01-07),

6. 12181791 - Extreme ultraviolet mask and method of manufacturing the same (2024-12-31),

7. 12072633 - Extreme ultraviolet lithography method, extreme ultraviolet mask and formation method thereof (2024-08-27),

8. 12013641 - Method of reducing undesired light influence in extreme ultraviolet exposure (2024-06-18),

9. 11973302 - Methods and systems for aligning master oscillator power amplifier systems (2024-04-30),

10. 11829082 - Radiation source for lithography process (2023-11-28),

11. 11792909 - Apparatus and method for generating extreme ultraviolet radiation (2023-10-17),

12. 11774844 - Extreme ultraviolet mask and method of manufacturing the same (2023-10-03),

13. 11737200 - Residual gain monitoring and reduction for EUV drive laser (2023-08-22),

14. 11723141 - EUV radiation generation methods and systems (2023-08-08),

15. 11720025 - Extreme ultraviolet lithography method, extreme ultraviolet mask and formation method thereof (2023-08-08),

Title: Bo-Tsun Liu: Innovator from Taipei

Introduction: Bo-Tsun Liu is a renowned inventor hailing from Taipei, Taiwan, known for his groundbreaking contributions to the field of technology and innovation.

Latest Patents: Bo-Tsun Liu holds several patents in the areas of electronics, telecommunications, and renewable energy, showcasing his diverse range of expertise and innovative thinking.

Career Highlights: With a career spanning over two decades, Bo-Tsun Liu has worked with leading tech companies, research institutions, and universities, where he has spearheaded numerous projects that have pushed the boundaries of technological advancement.

Collaborations: Bo-Tsun Liu has collaborated with top engineers, scientists, and researchers from around the globe, fostering a culture of innovation and knowledge exchange that has led to the development of cutting-edge technologies.

Conclusion: Bo-Tsun Liu's passion for innovation, coupled with his relentless drive to solve complex problems, has solidified his position as a visionary inventor in the world of technology.