Essex Junction, VT, United States of America

Beth A Ward


Average Co-Inventor Count = 6.8

ph-index = 4

Forward Citations = 36(Granted Patents)


Company Filing History:


Years Active: 2003-2014

where 'Filed Patents' based on already Granted Patents

9 patents (USPTO):

Title: Celebrating the Innovations of Inventor Beth A. Ward

Introduction: Beth A. Ward, an accomplished inventor based in Essex Junction, VT, has made significant contributions to the field of semiconductor technology. With a portfolio of nine patents, her work has greatly influenced the development and fabrication of MOSFETs and CMOS transistors.

Latest Patents: Among her notable recent inventions, Beth's patents include:

1. **Method for Fabricating a Nitrided Silicon-Oxide Gate Dielectric** - This innovative method outlines a process for fabricating a gate dielectric layer by providing a substrate, forming a silicon dioxide layer, and performing plasma nitridation in a reducing atmosphere. The outcome is a silicon oxynitride layer, which is crucial in the fabrication of Metal-Oxide-Semiconductor Field-Effect Transistors (MOSFETs).

2. **CMOS Transistor with a Polysilicon Gate Electrode Having Varying Grain Size** - This patent details a method to reduce electrical depletion in polysilicon gate electrodes. By controlling the deposition conditions, the crystal grain size varies through the thickness of the polysilicon, maximizing dopant activation and enhancing the overall performance and resistance of the transistor.

Career Highlights: Beth A. Ward has cultivated a successful career at the International Business Machines Corporation (IBM), where she has been at the forefront of semiconductor research and development. Her innovative approaches and patented methods have led to advancements in the efficiency and effectiveness of electronic devices.

Collaborations: Throughout her career, Beth has collaborated with several notable individuals, including James J. Quinlivan and Jay Sanford Burnham. These collaborations have fostered an environment of creativity and innovation, allowing for the exchange of ideas and further improvements in their respective fields.

Conclusion: Beth A. Ward's contributions to semiconductor technology exemplify the impact of dedicated inventors in the industry. With her nine patents, she continues to shape the future of electronics, demonstrating the importance of innovation and collaboration within the tech community.

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