Atsushi Kobayashi

Title: Innovations by Atsushi Kobayashi

Introduction

Atsushi Kobayashi is a notable inventor based in Miyagi, Japan. He has made significant contributions to the field of semiconductor manufacturing, holding a total of 4 patents. His work focuses on temperature control systems that are essential for the efficient operation of semiconductor devices.

Latest Patents

Kobayashi's latest patents include a temperature control system, a semiconductor manufacturing device, and a temperature control method. The temperature control system he developed features a first temperature adjustment unit that stores fluid at a first temperature and a second temperature adjustment unit that stores fluid at a higher temperature. It incorporates a low-temperature flow path for fluid from the first unit, a high-temperature flow path from the second unit, and a bypass flow path for circulating fluid. The system also includes a combination flow path that merges the three flow paths at a merging part. A temperature adjustment part cools or heats a member of a semiconductor manufacturing device, while a control device manages the valve positions of variable valves attached to the flow paths, adjusting the flow rate distribution ratio.

Career Highlights

Kobayashi has worked with prominent companies in the semiconductor industry, including Tokyo Electron Limited and CKD Corporation. His experience in these organizations has allowed him to refine his expertise in temperature control systems and semiconductor manufacturing processes.

Collaborations

Some of his notable coworkers include Atsuhiko Tabuchi and Hideki Wakai. Their collaboration has contributed to the advancement of technologies in the semiconductor field.

Conclusion

Atsushi Kobayashi's innovations in temperature control systems have made a significant impact on semiconductor manufacturing. His patents reflect his dedication to improving efficiency and performance in this critical industry.