The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Feb. 04, 2020
Filed:
May. 24, 2018
Tokyo Electron Limited, Tokyo, JP;
Ckd Corporation, Aichi, JP;
Atsushi Kobayashi, Miyagi, JP;
Atsuhiko Tabuchi, Miyagi, JP;
Hideki Wakai, Miyagi, JP;
Kazutoshi Itoh, Aichi, JP;
Yasuhisa Hirose, Aichi, JP;
Keiichi Nishikawa, Aichi, JP;
Takahiro Minatani, Aichi, JP;
Tokyo Electron Limited, Tokyo, JP;
CKD Corporation, Aichi, JP;
Abstract
A temperature control system includes a first temperature adjustment unit storing fluid at a first temperature; a second temperature adjustment unit storing fluid at a second temperature higher than the first temperature; a low-temperature flow path for passing fluid supplied from the first temperature adjustment unit; a high-temperature flow path for passing fluid supplied from the second temperature adjustment unit; a bypass flow path for circulating fluid; a combination flow path for passing fluid from the low-temperature flow path, the high-temperature flow path, and the bypass flow path merged at a merging part; a temperature adjustment part that passes fluid from the combination flow path and cools/heats a member of a semiconductor manufacturing device; and a control device that controls valve positions of variable valves attached to the three flow paths upstream of the merging part and adjusts the flow rate distribution ratio for the three flow paths.