Location History:
- Kanagawa, JP (2004)
- Miyagi, JP (2018 - 2021)
Company Filing History:
4 out of 10,317 
2 out of 317 
Years Active: 2004-2021
Title: Innovations by Inventor Hideki Wakai
Introduction
Hideki Wakai is a notable inventor based in Miyagi, Japan. He has made significant contributions to the field of temperature control systems, particularly in semiconductor manufacturing. With a total of 4 patents to his name, Wakai's work has had a substantial impact on the industry.
Latest Patents
Wakai's latest patents include a temperature adjustment device and a substrate processing apparatus. The temperature adjustment device features a pedestal designed to receive a substrate, equipped with a first temperature control unit that sets a first medium at a lower temperature and a second temperature control unit that sets a second medium at a higher temperature. This innovative design allows for efficient temperature management through a flow passage that enables the switching between the two media.
Another significant patent is the temperature control system, which includes a first temperature adjustment unit that stores fluid at a lower temperature and a second unit that stores fluid at a higher temperature. This system incorporates multiple flow paths to manage the temperature of semiconductor manufacturing devices effectively. The control device within the system adjusts the flow rate distribution, ensuring optimal performance.
Career Highlights
Throughout his career, Wakai has worked with prominent companies such as Tokyo Electron Limited and CKD Corporation. His experience in these organizations has allowed him to refine his expertise in temperature control technologies and semiconductor manufacturing processes.
Collaborations
Wakai has collaborated with notable colleagues, including Atsushi Kobayashi and Atsuhiko Tabuchi. These partnerships have contributed to the advancement of his innovative projects and patents.
Conclusion
In summary, Hideki Wakai is a distinguished inventor whose work in temperature control systems has significantly influenced semiconductor manufacturing. His innovative patents and collaborations highlight his commitment to advancing technology in this critical field.