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Atsuhiko Tabuchi

USPTO Granted Patents = 4

Average Co-Inventor Count = 1.8

ph-index = 2

Forward Citations = 11(Granted Patents)

Company Filing History:

4 out of 10,317

Tokyo Electron Limited

Ckd Corporation

where one patent can have more than one assignee

Years Active: 2014-2020

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4 patents (USPTO):Sort by Forward CitationsExplore Patents

1. 10553463 - Temperature control system, semiconductor manufacturing device, and temperature control method (2020-02-04),

2. 9984908 - Temperature control system, semiconductor manufacturing device, and temperature control method (2018-05-29),

3. 9664460 - Method of supplying temperature control fluid to temperature control system and storage medium (2017-05-30),

4. 8809197 - Plasma etching apparatus and control method (2014-08-19),

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