The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
May. 30, 2017
Filed:
Jul. 18, 2013
Tokyo Electron Limited, Tokyo, JP;
Atsuhiko Tabuchi, Miyagi, JP;
TOKYO ELECTRON LIMITED, Tokyo, JP;
Abstract
A temperature control systemincludes a joint paththat supplies a fluid from a low-temperature pathhaving a variable valveand a high-temperature pathhaving a variable valveto a temperature regulation member; a bypass paththat has a variable valveand circulates the fluid flowing a collection paththat collects the supplied fluid through the temperature regulation member; a circulation pumpat the collection path; and a tankthat is provided at an upstream side of the circulation pump and supplies the fluid to the circulation pump when an amount of the fluid reaches a preset amount. The variable valvesandare opened to supply the fluid, and the valvesandare opened to supply the fluid after detecting that the amount of the fluid in the tankreaches the preset amount.