Sunnyvale, CA, United States of America

Arun Ramamoorthy


Average Co-Inventor Count = 2.6

ph-index = 4

Forward Citations = 67(Granted Patents)


Location History:

  • Milpitas, CA (US) (2003 - 2008)
  • Milipitas, CA (US) (2008)
  • Sunnyvale, CA (US) (2003 - 2015)

Company Filing History:


Years Active: 2003-2015

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8 patents (USPTO):Explore Patents

Title: Arun Ramamoorthy: Innovator in Semiconductor Technology

Introduction

Arun Ramamoorthy is a prominent inventor based in Sunnyvale, CA, known for his significant contributions to semiconductor technology. With a total of 8 patents to his name, he has made remarkable advancements in the field, particularly in defect mitigation structures and erosion resistance in extreme ultraviolet (EUV) light sources.

Latest Patents

One of his latest patents focuses on defect mitigation structures for semiconductor devices. This innovation provides a method and a semiconductor device that incorporates defect mitigation structures, which include a substrate and a combination of layers of doped or undoped group IV alloys and metal or non-metal nitrides. The device is designed to enhance performance by fabricating multiple defect mitigation layers, ensuring improved functionality. Another notable patent addresses erosion resistance of EUV source electrodes. This invention proposes methods to reduce material erosion in electrodes by treating their surfaces, incorporating grooves to enhance material re-deposition, and applying coatings to mitigate erosion caused by plasma interactions.

Career Highlights

Throughout his career, Arun has worked with leading companies in the technology sector, including Intel Corporation and Piquant Research LLC. His experience in these organizations has allowed him to develop and refine his innovative ideas, contributing to advancements in semiconductor technology.

Collaborations

Arun has collaborated with notable professionals in his field, including Robert L Bristol and Hsing-Chien Ma. These partnerships have fostered a collaborative environment that encourages innovation and the sharing of ideas.

Conclusion

Arun Ramamoorthy's work in semiconductor technology exemplifies the spirit of innovation. His patents and collaborations reflect a commitment to advancing the field and addressing critical challenges in technology. His contributions will undoubtedly continue to influence the industry for years to come.

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