The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Aug. 19, 2008
Filed:
Feb. 27, 2004
Applicants:
Arun Ramamoorthy, Milipitas, CA (US);
Robert Bristol, Portland, OR (US);
Inventors:
Arun Ramamoorthy, Milipitas, CA (US);
Robert Bristol, Portland, OR (US);
Assignee:
Intel Corporation, Santa Clara, CA (US);
Attorney:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
F26B 7/00 (2006.01); G03B 27/58 (2006.01); G03B 27/42 (2006.01); B65D 85/48 (2006.01); G03F 9/00 (2006.01); A47L 13/15 (2006.01); D02G 3/00 (2006.01);
U.S. Cl.
CPC ...
Abstract
A reticle carrier for an Extreme Ultraviolet (EUV) reticle may include nested grids of electret fibers to provide active protection from contamination without a power supply. The reticle carrier may include in-line sensors for in-situ monitoring of contamination. Grids of electret fibers may also be used in an EUV pellicle.