The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Nov. 11, 2003
Filed:
Sep. 21, 2001
Applicant:
Inventors:
Arun Ramamoorthy, Milpitas, CA (US);
Hsing-Chien (Andy) Ma, Fremont, CA (US);
Barry R. Lieberman, Los Altos, CA (US);
Assignee:
Intel Corporation, Santa Clara, CA (US);
Primary Examiner:
Int. Cl.
CPC ...
G03B 2/758 ; G03B 2/742 ; B65D 8/548 ; G03F 9/00 ;
U.S. Cl.
CPC ...
G03B 2/758 ; G03B 2/742 ; B65D 8/548 ; G03F 9/00 ;
Abstract
A reticle carrier used in semiconductor manufacture. The carrier includes a bottom cover and a top cover having a transparent window. A protective lid may also be included. The box includes ports to allow nitrogen gas to enter and purge the inside. The transparent window is used for inspection and photochemical clean. However, since no material is available which can suitably handle smaller wavelength radiation, the reticle is removed from the carrier when exposure at these wavelengths is required.