Location History:
- Glenham, NY (US) (2003 - 2004)
- Queens Village, NY (US) (2004 - 2005)
Company Filing History:
Years Active: 2003-2005
Title: Arthur W. Martin: Innovator in Semiconductor Technology
Introduction
Arthur W. Martin is a notable inventor based in Queens Village, NY (US). He has made significant contributions to the field of semiconductor technology, holding a total of 4 patents. His work focuses on improving the efficiency and reliability of semiconductor devices.
Latest Patents
Among his latest patents is a method and apparatus for controlling coating thickness. This innovation allows for the control of the coating thickness and uniformity of spin-on deposition layers on semiconductor wafers. The process involves in situ control of the viscosity and homogeneity of the mixture of precursor material and solvent material. The thickness of the deposited material is selected, and the viscosity required at a given spin rate for the selected thickness is automatically mixed. Sensing and control apparatus are employed to ensure that the uniformity and viscosity required are maintained before dispensing onto the semiconductor wafer. Additionally, he has developed a structure and method for reducing thermo-mechanical stress in stacked vias. This interconnect structure for a semiconductor device includes an organic, low dielectric constant (low-k) dielectric layer formed over a lower metallization level. A via is formed within the low-k dielectric layer, connecting a lower metallization line with an upper metallization line. The via is surrounded by a structural collar selected from a material having a coefficient of thermal expansion (CTE) to protect it from shearing forces following thermal expansion of the low-k dielectric layer.
Career Highlights
Arthur W. Martin is currently employed at International Business Machines Corporation (IBM), where he continues to innovate in semiconductor technology. His work has had a profound impact on the industry, enhancing the performance and reliability of semiconductor devices.
Collaborations
He has collaborated with notable coworkers such as Habib Hichri and Kelly Malone, contributing to various projects that advance semiconductor technology.
Conclusion
Arthur W. Martin's contributions to semiconductor technology through his patents and work at IBM highlight his role as a key innovator in the field. His inventions continue to shape the future of semiconductor devices.
Inventor’s Patent Attorneys refers to legal professionals with specialized expertise in representing inventors throughout the patent process. These attorneys assist inventors in navigating the complexities of patent law, including filing patent applications, conducting patent searches, and protecting intellectual property rights. They play a crucial role in helping inventors secure patents for their innovative creations.