Company Filing History:
Years Active: 2012-2020
Title: Innovations of Arthur Paul Riaf in Semiconductor Technology
Introduction
Arthur Paul Riaf, an accomplished inventor based in Gloucester, MA, has made significant contributions to the field of semiconductor technology with a total of seven patents to his name. His innovative designs aim to enhance the efficiency and reliability of semiconductor processing and equipment.
Latest Patents
Among his most notable recent inventions is a patented platen for reducing particle contamination on a substrate and a method thereof. This technology outlines a unique platen design comprising different regions that maintain equal pressure levels. The platen features a body that includes first and second recesses, where the first recess functions as a fluid region to maintain the substrate at a desired temperature, while the second recess forms a cavity for holding a ground circuit. The design integrates a first via with openings that ensure the pressure level of the fluid region corresponds to the pressure level of the cavity.
Another noteworthy patent by Riaf involves a rotary union specifically designed for semiconductor processing applications. This innovative rotary union connects a platen base and a platen of a rotating assembly. It incorporates a coiled flexible tube member that facilitates the flow of cryogenic fluid for cooling during ion implant procedures. The design allows the flexible tube to adapt between two configurations as the platen rotates, optimizing both functionality and efficiency.
Career Highlights
Arthur Paul Riaf is affiliated with Varian Semiconductor Equipment Associates, Inc., a leading company in the semiconductor industry known for its cutting-edge equipment and technologies. His work at Varian has fostered advancements in semiconductor manufacturing processes, making him a key contributor to the company's successes.
Collaborations
Throughout his career, Riaf has collaborated with notable colleagues, including David E. Suuronen and Dale K. Stone. Together, they have driven innovations that enhance semiconductor technology, reflecting a strong spirit of teamwork and shared vision in advancing the field.
Conclusion
Arthur Paul Riaf's inventive spirit and technical expertise have made a lasting impact on the semiconductor industry. With multiple patents that address critical challenges in particle contamination and cooling processes, Riaf continues to contribute to advancements that will shape the future of semiconductor manufacturing.