The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Mar. 25, 2014
Filed:
Jun. 18, 2009
David E. Suuronen, Newburyport, MA (US);
Dale K. Stone, Lynnfield, MA (US);
Shigeo Oshiro, Gloucester, MA (US);
Arthur P. Riaf, Gloucester, MA (US);
Edward D. Macintosh, Amesbury, MA (US);
David E. Suuronen, Newburyport, MA (US);
Dale K. Stone, Lynnfield, MA (US);
Shigeo Oshiro, Gloucester, MA (US);
Arthur P. Riaf, Gloucester, MA (US);
Edward D. MacIntosh, Amesbury, MA (US);
Varian Semiconductor Equipment Associates, Inc., Gloucester, MA (US);
Abstract
Techniques for reducing particle contamination on a substrate are disclosed. In one particular exemplary embodiment, the technique may be realized with a ground pin that extends two regions of a platen that support the substrate. The ground pin may comprise a pin body; and a sleeve comprising an upper portion, a side portion, and a lower portion, the sleeve being configured to fit around the pin body, the sleeve including a fluid channel configured to transport fluid between the upper portion and the lower portion of the sleeve.