The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Apr. 03, 2012
Filed:
Jun. 04, 2008
Roger B. Fish, Bedford, MA (US);
Samuel M. Barsky, Wakefield, MA (US);
Scott C. Holden, Melrose, MA (US);
Arthur P. Riaf, Gloucester, MA (US);
Steven M. Anella, West Newbury, MA (US);
Roger B. Fish, Bedford, MA (US);
Samuel M. Barsky, Wakefield, MA (US);
Scott C. Holden, Melrose, MA (US);
Arthur P. Riaf, Gloucester, MA (US);
Steven M. Anella, West Newbury, MA (US);
Varian Semiconductor Equipment Associates, Inc., Gloucester, MA (US);
Abstract
Techniques for changing temperature of a platen are disclosed. In one particular exemplary embodiment, the techniques may be realized as an apparatus for changing temperature of a platen comprising a platen and one or more movable thermal pads comprising one or more thermal fluid channels to carry a thermal fluid configured to affect a temperature of the platen.