Company Filing History:
Years Active: 2000-2003
Title: The Innovations of Anne E Sanderfer
Introduction
Anne E Sanderfer is a prominent inventor based in Campbell, CA (US). She has made significant contributions to the field of semiconductor technology, holding a total of 9 patents. Her work focuses on improving manufacturing processes and enhancing the performance of semiconductor devices.
Latest Patents
One of her latest patents is titled "Method for ultra thin resist linewidth reduction using implantation." This invention relates to a system and method for reducing the linewidth of ultra-thin resist features. The process involves applying a densification technique to an ultra-thin resist that is less than about 2500 Å thick, formed over a semiconductor structure. The method includes providing a semiconductor substrate with a device film layer, depositing an ultra-thin resist, and patterning it using conventional photolithography techniques. After development, the resist is implanted with a dopant, followed by anisotropic etching of the device film layer.
Another notable patent is "BC13/AR chemistry for metal overetching on a high density plasma etcher." This invention describes a method for manufacturing semiconductor devices by forming layers of materials on a substrate and utilizing various etch chemistries. The process includes etching a hardmask material, performing a breakthrough etch on an antireflection layer, and executing a main etch to remove approximately 80 percent of the metal film. The method ensures that the resulting metal film stack has straight profiles and smooth sidewalls.
Career Highlights
Anne E Sanderfer is currently employed at Advanced Micro Devices Corporation, where she continues to innovate in semiconductor technology. Her expertise and contributions have made her a valuable asset to the company and the industry as a whole.
Collaborations
Throughout her career, Anne has collaborated with notable colleagues, including Minh Van Ngo and Simon S Chan. These partnerships have fostered a collaborative environment that enhances innovation and drives advancements in semiconductor manufacturing.
Conclusion
Anne E Sanderfer's work exemplifies the spirit of innovation in the semiconductor industry. Her patents and contributions have significantly impacted the field, showcasing her expertise and dedication to advancing technology.
Inventor’s Patent Attorneys refers to legal professionals with specialized expertise in representing inventors throughout the patent process. These attorneys assist inventors in navigating the complexities of patent law, including filing patent applications, conducting patent searches, and protecting intellectual property rights. They play a crucial role in helping inventors secure patents for their innovative creations.