Company Filing History:
Years Active: 2012-2017
Title: Inventor Anirban Guha: Innovating Plasma Stripping Technologies
Introduction
Anirban Guha, an influential inventor based in Milpitas, California, has made significant contributions to the field of semiconductor processing with a portfolio of five patents. His work focuses on enhancing methods for stripping photoresist and improving residue removal processes, which are vital in the semiconductor manufacturing industry.
Latest Patents
Among Anirban's latest innovations is the development of an ultra-low silicon loss high dose implant strip. This invention presents improved methods for stripping photoresist and removing ion implant-related residues from a workpiece surface. By utilizing plasma generated from elemental hydrogen, a fluorine-containing gas, and a protectant gas, the process efficiently removes both crust and bulk resist layers while safeguarding exposed areas of the workpiece surface. The resulting surface is substantially residue-free and exhibits minimal silicon loss.
Moreover, Anirban has worked on systems, components, and methods for plasma stripping that feature a gas flow distribution receptacle. This receptacle is designed with a rounded section that defines a reception cavity, promoting enhanced gas flow and efficiency in plasma chamber operations. The innovative arrangement of rings and openings allows for optimal gas distribution, further advancing the capabilities of plasma stripping processes.
Career Highlights
Anirban Guha currently operates at Novellus Systems Incorporated, where he harnesses his expertise to push the boundaries of semiconductor technology. His innovative spirit and technical knowledge have made him a key player in the industry.
Collaborations
Throughout his career, Anirban has collaborated with notable colleagues, including David Wingto Cheung and Kirk J. Ostrowski. These collaborations have enabled the sharing of ideas and advancements, creating an environment conducive to innovation and technological progress.
Conclusion
Anirban Guha stands out as a dedicated inventor whose contributions to plasma stripping technologies and semiconductor processing have paved the way for notable advancements in the industry. His commitment to innovation continues to inspire future generations of inventors and researchers.
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