The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Oct. 21, 2014
Filed:
Jun. 11, 2012
James A. Fair, Mountain View, CA (US);
Vincent Decaux, Mountain View, CA (US);
Anirban Guha, Milpitas, CA (US);
David Cheung, Foster City, CA (US);
John Keller, Newburgh, NY (US);
Peter Jagusch, Los Gatos, CA (US);
James A. Fair, Mountain View, CA (US);
Vincent Decaux, Mountain View, CA (US);
Anirban Guha, Milpitas, CA (US);
David Cheung, Foster City, CA (US);
John Keller, Newburgh, NY (US);
Peter Jagusch, Los Gatos, CA (US);
Novellus Systems, Inc., Fremont, CA (US);
Abstract
Embodiments of a plasma generator apparatus for ashing a work piece are provided. The apparatus includes a container adapted for continuous gas flow there through from an inlet end to an outlet end thereof. The container is fabricated of a dielectric material and adapted for ionization therein of a portion of at least one component of gas flowing therethrough. A gas flow distributor is configured to direct gas flow to a region within the container and a coil surrounds at least a portion of side walls of the container adjacent the region of the container to which the gas flow distributor directs gas flow. A radio frequency generator is coupled to the coil.