Peter Jagusch

Title: Innovations of Peter Jagusch in Plasma Technology

Introduction

Peter Jagusch is an accomplished inventor based in Los Gatos, CA (US). He has made significant contributions to the field of plasma technology, particularly through his innovative designs and patents. His work has implications for various applications, including semiconductor manufacturing and materials processing.

Latest Patents

Peter Jagusch holds a patent for a plasma generator apparatus. This invention provides embodiments of a plasma generator apparatus for ashing a work piece. The apparatus includes a container designed for continuous gas flow from an inlet end to an outlet end. The container is made of a dielectric material, which allows for the ionization of a portion of at least one component of gas flowing through it. Additionally, a gas flow distributor is configured to direct gas flow to a specific region within the container. A coil surrounds part of the container's side walls adjacent to the gas flow region, and a radio frequency generator is coupled to the coil. This innovative design enhances the efficiency and effectiveness of plasma generation.

Career Highlights

Peter Jagusch has had a notable career, working with Novellus Systems Incorporated, a company known for its advanced semiconductor manufacturing equipment. His expertise in plasma technology has positioned him as a key player in the industry.

Collaborations

Throughout his career, Peter has collaborated with talented individuals such as James A Fair and Vincent Bernard Decaux. These collaborations have contributed to the advancement of technology in their respective fields.

Conclusion

Peter Jagusch's contributions to plasma technology through his patent for a plasma generator apparatus demonstrate his innovative spirit and technical expertise. His work continues to influence the industry and pave the way for future advancements.