Novellus Systems Incorporated

Peter Jagusch

David Wingto Cheung

James A Fair

John Keller

Anirban Guha

Vincent Bernard Decaux

Embodiments of a plasma generator apparatus for ashing a work piece are provided. The apparatus includes a container adapted for continuous gas flow there through from an inlet end to an outlet end thereof. The container is fabricated of a dielectric material and adapted for ionization therein of a portion of at least one component of gas flowing therethrough. A gas flow distributor is configured to direct gas flow to a region within the container and a coil surrounds at least a portion of side walls of the container adjacent the region of the container to which the gas flow distributor directs gas flow. A radio frequency generator is coupled to the coil.

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Los Gatos, CA, United States of America

Peter Jagusch