Location History:
- San Francisco, CA (US) (2005)
- Mountain View, CA (US) (2014)
Company Filing History:
Years Active: 2005-2014
Title: Vincent Bernard Decaux: Innovator in Plasma Technology
Introduction
Vincent Bernard Decaux is a notable inventor based in San Francisco, CA. He has made significant contributions to the field of plasma technology, holding 2 patents that showcase his innovative approach to semiconductor processing.
Latest Patents
One of his latest patents is the "Plasma generator apparatus." This invention provides embodiments of a plasma generator apparatus designed for ashing a work piece. The apparatus features a container that allows for continuous gas flow from an inlet to an outlet. It is constructed from a dielectric material, facilitating the ionization of gas components flowing through it. Additionally, a gas flow distributor directs the gas to a specific region within the container, while a coil surrounds the container's side walls to enhance the gas flow. A radio frequency generator is coupled to this coil, further optimizing the apparatus's functionality.
Another significant patent is the "Single-tube interlaced inductively coupling plasma source." This plasma source is intended for use in semiconductor processing and includes a radio-frequency generator, an impedance matching network, and a coil that encloses a tube. The coil is bifilar, meaning its turns are interlaced with those of a second winding. Unlike conventional designs that use a single matching network for multiple coils, this innovative arrangement supplies only one coil in the plasma source.
Career Highlights
Vincent is currently employed at Novellus Systems Incorporated, where he continues to develop cutting-edge technologies in plasma applications. His work has positioned him as a key player in the semiconductor industry.
Collaborations
Throughout his career, Vincent has collaborated with esteemed colleagues, including Yuh-Jia (Jim) Su and David L Chen. These partnerships have contributed to the advancement of his projects and innovations.
Conclusion
Vincent Bernard Decaux is a prominent inventor whose work in plasma technology has led to significant advancements in semiconductor processing. His patents reflect his commitment to innovation and excellence in his field.
Inventor’s Patent Attorneys refers to legal professionals with specialized expertise in representing inventors throughout the patent process. These attorneys assist inventors in navigating the complexities of patent law, including filing patent applications, conducting patent searches, and protecting intellectual property rights. They play a crucial role in helping inventors secure patents for their innovative creations.