Andrej Mitrovic

USPTO Granted Patents = 36 (Patent Applications = 1)

Average Co-Inventor Count = 2.0

ph-index = 12

Forward Citations = 501(Granted Patents)

Company Filing History:

34 out of 10,295

Tokyo Electron Limited

patents

1 out of 84

Tel Epion Corporation

patents

1 out of 832,680

Other

patents

Years Active: 2004-2024

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36 patents (USPTO):Sort by Forward Citations

Abstract keywords

1. 12158374 - Time-resolved OES data collection (2024-12-03),

2. 8296687 - System and method for using first-principles simulation to analyze a process performed by a semiconductor processing tool (2012-10-23),

3. 8173980 - Gas cluster ion beam system with cleaning apparatus (2012-05-08),

4. 8073667 - System and method for using first-principles simulation to control a semiconductor manufacturing process (2011-12-06),

5. 8050900 - System and method for using first-principles simulation to provide virtual sensors that facilitate a semiconductor manufacturing process (2011-11-01),

6. 8036869 - System and method for using first-principles simulation to control a semiconductor manufacturing process via a simulation result or a derived empirical model (2011-10-11),

7. 8032348 - System and method for using first-principles simulation to facilitate a semiconductor manufacturing process (2011-10-04),

8. 8014991 - System and method for using first-principles simulation to characterize a semiconductor manufacturing process (2011-09-06),

9. 7789963 - Chuck pedestal shield (2010-09-07),

10. 7591923 - Apparatus and method for use of optical system with a plasma processing system (2009-09-22),

11. 7353141 - Method and system for monitoring component consumption (2008-04-01),

12. 7241397 - Honeycomb optical window deposition shield and method for a plasma processing system (2007-07-10),

13. 7233878 - Method and system for monitoring component consumption (2007-06-19),

14. 7230204 - Method and system for temperature control of a substrate (2007-06-12),

15. 7208067 - Method and system for monitoring RF impedance to determine conditions of a wafer on an electrostatic chuck (2007-04-24),

Title: **Andrej Mitrovic: Innovator in Semiconductor Processing Technology**

Introduction

Andrej Mitrovic is an accomplished inventor based in Phoenix, AZ, known for his significant contributions to the field of semiconductor processing. With a commendable portfolio of 36 patents, he continues to push the boundaries of innovation in this critical technology sector.

Latest Patents

Among his latest patents, two stand out for their implications in improving semiconductor processing techniques. The first is a patent titled "Time-resolved OES Data Collection." This innovative method involves processing a substrate by exposing it to plasma in a processing chamber, employing two distinct power applications to enhance its efficiency. The second notable patent is titled "System and Method for Using First-principles Simulation to Analyze a Process Performed by a Semiconductor Processing Tool." This invention integrates first-principles modeling to analyze semiconductor processes accurately, enabling the detection of faults that may arise during tool operation.

Career Highlights

Andrej Mitrovic's career features significant roles at reputable companies in the semiconductor industry, notably at Tokyo Electron Limited and Tel Epion Corporation. His work at these organizations has allowed him to develop and refine his expertise in semiconductor technologies, leading to his impressive patent portfolio.

Collaborations

Throughout his career, Mitrovic has had the opportunity to collaborate with notable professionals such as Eric J Strang and Wayne L Johnson. These collaborations have further enriched his inventive contributions to the field, fostering an environment of shared knowledge and innovation.

Conclusion

In summary, Andrej Mitrovic’s innovation in semiconductor processing, underscored by his 36 patents, reveals his commitment to advancing technology in the industry. His latest patents not only demonstrate his technical prowess but also highlight his ability to foresee and solve complex challenges in semiconductor processing. With a strong career foundation and collaborative spirit, Mitrovic stands as a significant figure in the realm of technological innovations.

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