Location History:
- Laurel, MD (US) (2000 - 2003)
- Braga, PT (2003)
Company Filing History:
Years Active: 2000-2003
Title: The Innovative Contributions of Andre G Cardoso
Introduction
Andre G Cardoso is a notable inventor based in Laurel, MD (US), recognized for his significant contributions to the field of plasma processing technology. With a total of six patents to his name, Cardoso has developed innovative solutions that enhance the efficiency and effectiveness of etching processes in semiconductor manufacturing.
Latest Patents
Among his latest patents is the "Shallow angle interference process and apparatus for determining real-time etching rate." This invention provides a method for determining the etching rate during plasma-mediated etching by monitoring an interference pattern created by a direct light beam and a reflected light beam from a wafer surface. The design allows for a viewing angle that is nearly parallel to the wafer plane, ensuring accurate real-time measurements. Another significant patent is the "Optimized optical system design for endpoint detection," which focuses on enhancing optical detection systems for endpoint detection using optical emission spectroscopy. This optimization addresses the specific needs of radiant heated wafer systems in downstream process chambers, maximizing signal light and improving signal-to-noise ratios.
Career Highlights
Throughout his career, Andre G Cardoso has worked with prominent companies such as Axcelis Technologies, Inc. and Eaton Corporation. His experience in these organizations has allowed him to apply his innovative ideas and contribute to advancements in semiconductor technology.
Collaborations
Cardoso has collaborated with several professionals in his field, including Alan C Janos and Joel Penelon. These collaborations have further enriched his work and led to the development of groundbreaking technologies.
Conclusion
Andre G Cardoso's contributions to the field of plasma processing and semiconductor manufacturing are noteworthy. His innovative patents and career achievements reflect his dedication to advancing technology in this critical industry.