The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Aug. 29, 2000
Filed:
Dec. 17, 1998
Applicant:
Inventors:
Joel Penelon, Monrovia, MD (US);
Andre Cardoso, Laurel, MD (US);
Assignee:
Eaton Corporation, Cleveland, OH (US);
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
C23C / ; H05H / ;
U.S. Cl.
CPC ...
118724 ; 156345 ; 374208 ; 165 801 ;
Abstract
A temperature probe for use in low pressure processes having an improved thermal response wherein fluid is supplied to a fluid transport passageway in the probe head for creating an increased pressure between the probe head and a semiconductor wafer for increasing the thermal conductivity therebetween.
Penelon, Joel. (2000). Temperature probe and measurement method for low pressure process (U.S. Patent No. 6110288). U.S. Patent and Trademark Office. https://idiyas.com/patent/badge/6110288
Data source: USPTO (United States Patent and Trademark Office) public patent records. Weekly synchronization. How IDiyas builds this profile